Good performance and large -scale manufacturing, Shanghai scientists develop new optical ＂silicon＂ and chip technology
Lithium sterilicate heterogeneous integrated wafer and high -performance photon chip schematic diagram.Figures of Shanghai Micro System and Information Technology Research Institute of Chinese Academy of Sciences
Ou Xin team, a researcher at the Institute of Micro Systems and Information Technology of the Chinese Academy of Sciences, and the Tomas Kippeberg team of the Federal Institute of Technology in Lausanne, Switzerland, has made breakthroughsSexual progress.Related results were published in “Nature” on May 8.
In recent years, lithium crickets have received widespread attention, and they are known as “optical silicon”. Foreign universities and research institutions such as Harvard University in the United States have even proposed a solution to the construction of a new generation of “Silicon Valley” model in the “Silicon Valley” model.
Ou Xin team and collaborators found that compared with lithium lithium, monocrystalline lithium lithium films not only have similar excellent electro -light conversion characteristics, but alsoIt is more advantageous.In addition, lithium pyrite film can achieve low -cost and large -scale manufacturing, which has extremely high application value.
Ou Xin’s team adopted heterogeneous integrated technology based on the “universal ion knife”, and injects the method of combining the wafer bonding into the chin bonding by hydrogen ions to prepare high -quality silicon -based single -crystal thin -film heterogeneous wafers.They also jointly developed the micro -nanoidal processing method of ultra -low lithium lithium ticanate device. The optical loss of the corresponding devices is generally lower than the lithium rigidate waveguide value of the lithium waveguide under the wafer -level process.
The lithium lithium photon chip shows the comparable electro -light modulation efficiency as the lithium -lithium film. At the same time, the research team has successfully generated the lonely optical frequency comb on the X -cut electro -optical platform for the first time. Combined with its electro -optic mission, it is expected to be in laser radar and precision.Realize application and other aspects.At present, the research team is related to the 8 -inch wafer preparation technology, thinking that the development of larger domestic optoelectronic integrated chips and mobile terminal radio frequency filter chips laid the core material foundation.
Ou Xin introduced: “Compared with the lithium film of the film, the lithium film is easier to prepare and the preparation efficiency is higher. At the same time, the lithium lithium membrane has a wider transparent window, strong electrical light modulation, weak dual refraction, stronger ones, stronger onesAnti -light folding characteristics, this congenital material advantage greatly expands the degree of optical design of the lithium pyrium platform
Author: Xu Qimin
Text: Text: Xu Qimintu: Responsible editors: Ren Quan
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